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Humidity Generator

The Humidity Generator is designed for fast and precise humidity control for small chambers. Generation of the gas flow directly at the target volume ensures fast control response time even for large changes in relative humidity. The humidity is generated by circulating nitrogen gas inside thermalised H2O and D2O reservoirs. It is also possible to mix nitrogen with an optional gas circulating in an optional liquid. In this case, the user selects the nature of the gas from a long list of gases already implemented in the mass-flow controllers.

The generator is operated by a Process Logic Controller M251 from Schneider and connected to a thermostatic bath regulating the base temperature of the Peltier elements controlling the temperature of the reservoirs. From the temperature and humidity setpoints, the total flow rate and the relative flow rates of D2O and optional liquid/gas provided by the user, the PLC determines the appropriate temperatures of the 8 reservoirs and the flow rates of the 8 mass-flow controllers.  The touch screen graphical user interface displays the evolution of the physical parameters, the actual operated humidity chamber and other parameters.

As startup, the controller is in local mode (i.e. not accessible remotely) and waits for its connection to a nitrogen line or bottle. It checks the levels of liquids (H2O and D20) and proceed a refill if needed. Once feed with nitrogen gas, the controller is ready for operation and allows operations which depend on the availability of liquids and optional gas.

PLC Registers (Schneider M251)
Address Access Type Description

0

Read

Real

Temperature setpoint (°C)

2

Read

Real

Relative humidity setpoint (%RH)

4

Read

Real

Total flow-rate setpoint (sccm)

6

Read

Real

D2O flow ratio setpoint (%)

8

Read

Real

Optional flow ratio setpoint (%)

10

Read/Write

Real

Requested temperature setpoint (°C)

12

Read/Write

Real

Requested relative Humidity setpoint (%)

14

Read/Write

Real

Requested total flow setpoint (sccm)

16

Read/Write

Real

Requested D2O flow ratio setpoint (%)

18

Read/Write

Real

Requested optional flow ratio setpoint (%)

20

Read

Real

Sample chamber temperature (°C)

22

Read

Real

Sample chamber therm. bath temperature (°C)

24

Read/Write

Real

Requested sample chamber therm. bath temperature setpoint (°C)

26

Read

Real

MFC #1 flow-rate of N2 dry line (sccm)

28

Read

Real

MFC #2 flow-rate of N2 dry line (sccm)

30

Read

Real

MFC #3 flow-rate of H2O saturated line (sccm)

32

Read

Real

MFC #4 flow-rate of H2O saturated line (sccm)

34

Read

Real

MFC #5 flow-rate of D2O saturated line (sccm)

36

Read

Real

MFC #6 flow-rate of D2O saturated line (sccm)

38

Read

Real

MFC #7 flow-rate of optional line (sccm)

40

Read

Real

MFC #8 flow-rate of optional line (sccm)

42

Read

Real

Temperature of H2O bath #1 (°C)

44

Read

Real

Temperature of H2O bath #2 (°C)

46

Read

Real

Temperature of D2O bath #3 (°C)

48

Read

Real

Temperature of D2O bath #4 (°C)

50

Read

Real

Temperature of optional line bath #5 (°C)

52

Read

Real

Temperature of optional line bath #6 (°C)

54

Read

Real

Heater temperature of N2 dry line (°C)

56

Read

Real

Heater temperature of optional line (°C)

58

Read

Real

Pressure in H20 saturated line (bar)

60

Read

Real

Pressure in D20 saturated line (bar)

62

Read

Real

Pressure in optional wet line (bar)

128

Read/Write

Unsigned Integer

NOMAD Control — Year

129

Read/Write

Unsigned Integer

NOMAD Control — Month

130

Read/Write

Unsigned Integer

NOMAD Control — Day

131

Read/Write

Unsigned Integer

NOMAD Control — Hour

132

Read/Write

Unsigned Integer

NOMAD Control — Minute

133

Read/Write

Unsigned Integer

NOMAD Control — Second

200

Read

Boolean (bit 0)

Optional gas source (0:wet, 1:dry)

-

Read

Boolean (bit 1)

Nitrogen gas source available

-

Read

Boolean (bit 2)

Optional gas source available

-

Read

Boolean (bit 3)

Optional gas wet line in use (calculated RH not reliable)

-

Read

Boolean (bit 4)

Regulation alarm

-

Read

Boolean (bit 5)

Regulation default

-

Read

Boolean (bit 6)

NOMAD Control — Setpoints discordance

-

Read/Write

Boolean (bit 7)

NOMAD Control — Select optional gas line mode (0:wet, 1:dry)

-

Read

Boolean (bit 8)

-

Read

Boolean (bit 9)

NOMAD Control — Idle

-

Read

Boolean (bit 10)

NOMAD Control — Running

-

Read

Boolean (bit 11)

NOMAD Control — Local (0) / Remote (1)

-

Read/Write

Boolean (bit 12)

NOMAD Control — Default Acknowledgment

-

Read/Write

Boolean (bit 13)

NOMAD Control — Update PLC clock